SCALE FACTOR ERROR* 7.87 mV/μm±6.5 % typ. (including interchangeability errors) Step : 200 μm, Target : 30 mm dia.

gap output: SCALE FACTOR ERROR* 7.87 mV/μm±6.5 % typ. (including interchangeability errors) Step : 200 μm, Target : 30 mm dia.